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Scientific Wet Process Technology for Innovative LSI/Fpd Manufacturing

on Jan 3,2009 in Science/Engineering comment »

Tadahiro Ohmi " Scientific Wet Process Technology for Innovative LSI/FPD Manufacturing"

CRC | 2005-12-21 | ISBN: 0849335434 | 400 pages | PDF | 15 MB

As science pushes closer toward the atomic size scale, new challenges arise to slow the pace of the miniaturization that has transformed our society and fueled…