Foundations of MEMS
For courses in Micro-Electro-Mechanical Systems (MEMS) taken by advanced undergraduate students, beginning graduate students, and professionals.
Foundations of MEMS is the first entry-level text of its kind for systematically teaching the specifics of MEMS to an interdisciplinary audience. Liu discusses designs, materials, and fabrication issues related to the MEMS field by employing concepts from both the electrical and mechanical engineering domains and by incorporating evolving microfabrication technology
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Micro Electro Mechanical Systems Interdisciplinary Audience Mems Mechanical Engineering Graduate Students Undergraduate Students Specifics Liu Foundations
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