CCD Image Sensors in Deep Ultraviolet: Degradation Behavior and Damage Mechanism
CCD Image Sensors in Deep-Ultraviolet: Degradation Behavior and Damage Mechanisms (Microtechnology and MEMS)
By F.M. Li, A. Nathan,
Publisher:Springer
Number Of Pages:231
Publication Date:2005-04-19
Sales Rank:2046912
ISBN / ASIN:354022680X
EAN:9783540226802
Binding:Hardcover
Manufacturer:Springer
Studio:Springer
Book Description:
As the deep-ultraviolet (DUV) laser technology continues to mature, an increasing number of industrial and manufacturing applications are emerging. For example, the new generation of semiconductor inspection systems is being pushed to image at increasingly shorter DUV wavelengths to facilitate inspection of deep sub-micron features in integrated circuits. DUV-sensitive charge-coupled device (CCD) cameras are in demand for these applications. Although CCD cameras that are responsive at DUV wavelengths freeduan.com are now available, their long-term stability is still a major concern. This book describes the degradation mechanisms and long-term performance of CCDs in the DUV, along with new results of device performance at these wavelengths.
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Ccd Image Sensors Degradation Mechanisms Ccd Cameras Damage Mechanisms Semiconductor Inspection Springer Book Manufacturing Applications Integrated Circuits Device Performance Charge Coupled Device Ccds Publisher Springer Laser Technology Wavelengths Term
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