MEMS Mechanical Sensors by Steve P. Beeby (2004)

MEMS Mechanical Sensors by Steve P. Beeby (2004).pdf

Product Details

Hardcover: 282 pages

Publisher: Artech House Publishers (May, 2004)

Language: English

ISBN: 1580535364

Book Description

Heres the book to keep handy when you have to overcome obstacles in design, simulation, fabrication and application of MEMS sensors. This practical guide to design tools and packaging helps you create the sensors you need for the full range of mechanical microsensor applications. Critical physical sensing techniques covered include piezoresistive, piezoelectric, capacative, optical, resonant, actuation, thermal, and magnetic, as well as smart sensing.

This new resource explores all the major areas of mechanical microsensors and takes an especially close look at pressure and inertial sensors. Engineers in industry and academia can tap into current and future market trends in such key applications areas for mechanical microsensors as force and torque, flow in microfluidics, and displacement. A thorough introduction to physical sensors, MEMS, and the properties of silicon brings you up to speed with the state of the art of this groundbreaking technology.

Kod:http://www.amazon.com/exec/obidos/tg/detail/-/1580535364/qid=1129060716/sr=8-1/ref=pd_bbs_1/002-4501697-2792806?v=glance&s=books&n=507846

thanks to strasno for this book